JPH0429588Y2 - - Google Patents

Info

Publication number
JPH0429588Y2
JPH0429588Y2 JP1987189965U JP18996587U JPH0429588Y2 JP H0429588 Y2 JPH0429588 Y2 JP H0429588Y2 JP 1987189965 U JP1987189965 U JP 1987189965U JP 18996587 U JP18996587 U JP 18996587U JP H0429588 Y2 JPH0429588 Y2 JP H0429588Y2
Authority
JP
Japan
Prior art keywords
substrate
firing
plate
straightening
ceramic substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987189965U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0193763U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987189965U priority Critical patent/JPH0429588Y2/ja
Publication of JPH0193763U publication Critical patent/JPH0193763U/ja
Application granted granted Critical
Publication of JPH0429588Y2 publication Critical patent/JPH0429588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
JP1987189965U 1987-12-16 1987-12-16 Expired JPH0429588Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987189965U JPH0429588Y2 (en]) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987189965U JPH0429588Y2 (en]) 1987-12-16 1987-12-16

Publications (2)

Publication Number Publication Date
JPH0193763U JPH0193763U (en]) 1989-06-20
JPH0429588Y2 true JPH0429588Y2 (en]) 1992-07-17

Family

ID=31480971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987189965U Expired JPH0429588Y2 (en]) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0429588Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018148163A (ja) * 2017-03-09 2018-09-20 日本特殊陶業株式会社 半導体製造装置用部品の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016998U (ja) * 1984-06-13 1985-02-05 株式会社東芝 セラミツク焼成用治具
JPS62119155A (ja) * 1985-11-20 1987-05-30 鳴海製陶株式会社 低温焼成セラミツクス基板の焼成方法

Also Published As

Publication number Publication date
JPH0193763U (en]) 1989-06-20

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